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PowerCIM SECS Communication Support Tool

PowerCIM SECS Communication Support Tool

This is a package software designed to easily build SECS (HSMS/SECS-I) communication (compliant with SEMI standards) for manufacturing, inspection, and transport equipment for semiconductor and LCD factories. Even without detailed knowledge of HSMS/SECS communication, users can set communication parameters and message definitions in a user-friendly dialog format (GUI).